Synthesis and characterization of ZnO/ZnAl2O4/Zn2TiO4 composite films by Ar–O2 mixture hollow cathode glow discharge

In this study, ZnO/ZnAl 2 O 4 /Zn TiO composite nanostructured thin films are deposited assisted with hollow-cathode glow discharge (HCD). The using various argon-oxygen gases mixture (0–50% ), and its effect on film quality, optical electrical properties is examined. Remarkably, instead of metallic targets, ZnO, 2, Al 3 powders filled in used for deposition, thus no specific targets required technique. consist hexagonal wurtzite ZnO structure, ZnAl 4, Zn phases, the crystalline size increases higher oxygen contents. thickness reduced by increasing contents, all exhibit transmittance than 82%. carrier concentration mobility increase, whereas resistivity decreases when a amount added. This study shows that HCD can effectively synthesize good properties. Additionally, film's elemental composition be tuned changing gas composition, thus, separate target materials required.